MEDSI2018 - Classification: Precision mechanics / Nano-Positionning

Paper

Title

Page

The Design of Exactly-Constrained X-Ray Mirror Systems for Sirius

173

R.R. Geraldes, G.V. Claudiano, V.Z. Ferreira, L. Sanfelici, A. Sikorski, M.S. Souza, H.C.N. Tolentino, L.M. Volpe, H. Westfahl Jr.
LNLS, Campinas, Brazil

Funding: Ministry of Science, Technology, Innovation and Communication (MCTIC)
The first set of Sirius beamlines is expected to start operating in early 2019. Regarding X-ray mirror sys-tems, a single design concept has been possible thanks to the standardization of side-bounce fixed-shape mirrors. To preserve the extreme quality of both the mirror figures and the source, the main design targets were minimizing mechanical and thermal distortions in the mirrors while maximizing mechanical and thermal stabilities. A deterministic high-resolution exactly-constrained flexure-based mirror support provides pitch tuning within 100 nrad and resonances above 150 Hz, while dealing with clamping and thermal ex-pansion effects. The adopted cooling strategy was indirect cryocooling via cryostats, drastically minimiz-ing thermal gradients and distortions in the mirrors, decoupling vibration sources and simplifying cooling circuits. Finally, a 5-degree-of-freedom granite bench, based on high-resolution levellers and air-bearing solutions, support the vacuum chamber, on which the internal mechanics is stiffly mounted. The specifica-tions, design and partial results are presented.

Slides WEOAMA04 [6.607 MB]

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reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2018-WEOAMA04

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WEOAMA05

FE Model of a Nanopositioning Flexure Stage for Diagnosis of Trajectory Errors

179

S.P. Kearney, D. Shu
ANL, Argonne, Illinois, USA

Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357.
The Advanced Photon Source Upgrade project includes upgrading several beamlines, which desire nanopositioning and fly-scan capabilities. A step towards achieving this is through the use of flexure stages with minimal trajectory errors. Typically, parasitic motion is on the order of micrometer-level displacements and tens of microradian-level rotations [1]. The cause of such errors is difficult to diagnosis due to the scale and complexity of the overall mechanism. Therefore, an FE model of a flexure pivot nanopositioning stage with centimeter-level travel range [1, 2] has been developed to aid in trajectory error diagnosis. Previous work used an FE model and relative error analysis to quantify the effects of assembly error on trajectory errors [3]. Relative error analysis was used due to the difficulty in validating a complex FE model. This study develops an experimentally validated FE model of a single joint to quantify the expected error in the full FE model. The full model is then compared experimentally to the flexure stage to assess the model accuracy and diagnosis trajectory errors.
* D. Shu, et al. In Proc. SPIE, vol. 10371, 2017.
** U.S. Patent granted No. 8,957, 567, D. Shu, S. Kearney, and C. Preissner, 2015.
*** S. Kearney and D. Shu. In Proc. SPIE, vol. 10371, 2017.

Slides WEOAMA05 [5.137 MB]

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reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2018-WEOAMA05

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WEPH33

Challenges for Nanopositioning

P. Wiljes
DESY, Hamburg, Germany

In nanopositioning systems there are plenty of disturbance sources corrupting the stability of the positioners and optics. Vibrations are induced by machines like pumps and coolers, as well as by car traffic hundreds of meters far from the facility. Furthermore the small and lightweight mechanical components are strongly influenced by sound waves. The positioners themselves may also produce vibrations or at least amplify them by the eigenfrequencies of their flexure joints, which are used for nanometer positioning accuracy without backlash. To identify the sources, amplification and damping of vibrations inside the setup, different kinds of measurements, including broadband frequency stimulation, have been performed on a setup at a nano experimental hutch of a PETRA III Beamline. Therefore some mechanical components and positioning stages were changed against stiffer materials to have comparable measurements to get statements about the quality of the mechanical properties. The poster shows the experimental setup, the measuring methods and some comparing vibration plots, which give information about the identified mechanical behavior.

Poster WEPH33 [1.591 MB]

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WEPH34

Research on Active Vibration Isolation System

280

J.B. Yu, L. Kang
IHEP, Beijing, People's Republic of China
J.X. Chen, H.Y. He, L. Liu, X.J. Nie, C.J. Ning, A.X. Wang, G.Y. Wang, Y.J. Yu, J.S. Zhang, D.H. Zhu
CSNS, Guangdong Province, People's Republic of China

Funding: work supported by Natural Science Foundation of China(11375217)
Based on the increase of accuracy requirements coming from increasing instrument precision, advanced isolation components are required, and active vibration control method is proposed. This paper mainly shows the experimental system, and some work has been done at present. Now that we are still at the beginning research of active vibration isolation, we hope it will be steadily used in the support systems of some precision equipment and instruments.

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WEPH35

System Design of Hard Xray Split and Delay

A.H. Barada, H. Shi, Y. Sun, D. Zhu
SLAC, Menlo Park, California, USA

A new hard X-Ray Split and Delay system has been recently commissioned on the SLAC XCS instrument beam-line. This presentation will explain the engineering decisions that drove the unique design of the precision mechanics and positioning systems in order to meet nanoradian positioning requirements. Recent performance data will be presented along with proposed enhancements as part of a continuing improvement development phase.
*Development of a hard x-ray split-delay system at the Linac Coherent Light Source, June 2017
DOI10.1117/12.2265171
Conference: SPIE Optics + Optoelectronics

Poster WEPH35 [1.992 MB]

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THKA01

Toward High Precision Position Control Using Laser Interferometry: Main Sources of Errors

S. Ducourtieux
LNE, Trappes Cedex, France

When designing or sizing a high precision positioning system using homodyne laser interferometry or when evaluating a measurement uncertainty of an already designed system, many error sources which can degrade the measurement precision have to be taken into account. Some errors originate from : -the mechanical and electronical integration of the interferometer (mechanical drift, dead path error, resolution limit, noise level, interpolation, cosine error, …) -the environment in which the instrument is installed (mechanical vibration, drift of environmental parameters like pressure, temperature, hygrometry, Edlen correction, air turbulence), -the optical components (mirror shape and roughness, orthogonality error), -intrinsic errors linked to the principles of interferometry (vacuum wavelength calibration of the laser source used, wavelength stability, calibration of environment sensor used for Edlen correction, beam profile quality,…) -… The given presentation will review the main errors sources, quantify and classify them by order of importance and establish the principle rules to achieve nanometer range precision when measuring displacements by interferometry.

Slides THKA01 [20.051 MB]

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Paper	Title	Page
WEOAMA04	The Design of Exactly-Constrained X-Ray Mirror Systems for Sirius	173
	R.R. Geraldes, G.V. Claudiano, V.Z. Ferreira, L. Sanfelici, A. Sikorski, M.S. Souza, H.C.N. Tolentino, L.M. Volpe, H. Westfahl Jr. LNLS, Campinas, Brazil
	Funding: Ministry of Science, Technology, Innovation and Communication (MCTIC) The first set of Sirius beamlines is expected to start operating in early 2019. Regarding X-ray mirror sys-tems, a single design concept has been possible thanks to the standardization of side-bounce fixed-shape mirrors. To preserve the extreme quality of both the mirror figures and the source, the main design targets were minimizing mechanical and thermal distortions in the mirrors while maximizing mechanical and thermal stabilities. A deterministic high-resolution exactly-constrained flexure-based mirror support provides pitch tuning within 100 nrad and resonances above 150 Hz, while dealing with clamping and thermal ex-pansion effects. The adopted cooling strategy was indirect cryocooling via cryostats, drastically minimiz-ing thermal gradients and distortions in the mirrors, decoupling vibration sources and simplifying cooling circuits. Finally, a 5-degree-of-freedom granite bench, based on high-resolution levellers and air-bearing solutions, support the vacuum chamber, on which the internal mechanics is stiffly mounted. The specifica-tions, design and partial results are presented.
	Slides WEOAMA04 [6.607 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2018-WEOAMA04
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEOAMA05	FE Model of a Nanopositioning Flexure Stage for Diagnosis of Trajectory Errors	179
	S.P. Kearney, D. Shu ANL, Argonne, Illinois, USA
	Funding: Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357. The Advanced Photon Source Upgrade project includes upgrading several beamlines, which desire nanopositioning and fly-scan capabilities. A step towards achieving this is through the use of flexure stages with minimal trajectory errors. Typically, parasitic motion is on the order of micrometer-level displacements and tens of microradian-level rotations [1]. The cause of such errors is difficult to diagnosis due to the scale and complexity of the overall mechanism. Therefore, an FE model of a flexure pivot nanopositioning stage with centimeter-level travel range [1, 2] has been developed to aid in trajectory error diagnosis. Previous work used an FE model and relative error analysis to quantify the effects of assembly error on trajectory errors [3]. Relative error analysis was used due to the difficulty in validating a complex FE model. This study develops an experimentally validated FE model of a single joint to quantify the expected error in the full FE model. The full model is then compared experimentally to the flexure stage to assess the model accuracy and diagnosis trajectory errors. * D. Shu, et al. In Proc. SPIE, vol. 10371, 2017. U.S. Patent granted No. 8,957, 567, D. Shu, S. Kearney, and C. Preissner, 2015. * S. Kearney and D. Shu. In Proc. SPIE, vol. 10371, 2017.
	Slides WEOAMA05 [5.137 MB]
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2018-WEOAMA05
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEPH33	Challenges for Nanopositioning
	P. Wiljes DESY, Hamburg, Germany
	In nanopositioning systems there are plenty of disturbance sources corrupting the stability of the positioners and optics. Vibrations are induced by machines like pumps and coolers, as well as by car traffic hundreds of meters far from the facility. Furthermore the small and lightweight mechanical components are strongly influenced by sound waves. The positioners themselves may also produce vibrations or at least amplify them by the eigenfrequencies of their flexure joints, which are used for nanometer positioning accuracy without backlash. To identify the sources, amplification and damping of vibrations inside the setup, different kinds of measurements, including broadband frequency stimulation, have been performed on a setup at a nano experimental hutch of a PETRA III Beamline. Therefore some mechanical components and positioning stages were changed against stiffer materials to have comparable measurements to get statements about the quality of the mechanical properties. The poster shows the experimental setup, the measuring methods and some comparing vibration plots, which give information about the identified mechanical behavior.
	Poster WEPH33 [1.591 MB]
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEPH34	Research on Active Vibration Isolation System	280
	J.B. Yu, L. Kang IHEP, Beijing, People's Republic of China J.X. Chen, H.Y. He, L. Liu, X.J. Nie, C.J. Ning, A.X. Wang, G.Y. Wang, Y.J. Yu, J.S. Zhang, D.H. Zhu CSNS, Guangdong Province, People's Republic of China
	Funding: work supported by Natural Science Foundation of China(11375217) Based on the increase of accuracy requirements coming from increasing instrument precision, advanced isolation components are required, and active vibration control method is proposed. This paper mainly shows the experimental system, and some work has been done at present. Now that we are still at the beginning research of active vibration isolation, we hope it will be steadily used in the support systems of some precision equipment and instruments.
DOI •	reference for this paper ※ https://doi.org/10.18429/JACoW-MEDSI2018-WEPH34
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

WEPH35	System Design of Hard Xray Split and Delay
	A.H. Barada, H. Shi, Y. Sun, D. Zhu SLAC, Menlo Park, California, USA
	A new hard X-Ray Split and Delay system has been recently commissioned on the SLAC XCS instrument beam-line. This presentation will explain the engineering decisions that drove the unique design of the precision mechanics and positioning systems in order to meet nanoradian positioning requirements. Recent performance data will be presented along with proposed enhancements as part of a continuing improvement development phase. *Development of a hard x-ray split-delay system at the Linac Coherent Light Source, June 2017 DOI10.1117/12.2265171 Conference: SPIE Optics + Optoelectronics
	Poster WEPH35 [1.992 MB]
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)

THKA01	Toward High Precision Position Control Using Laser Interferometry: Main Sources of Errors
	S. Ducourtieux LNE, Trappes Cedex, France
	When designing or sizing a high precision positioning system using homodyne laser interferometry or when evaluating a measurement uncertainty of an already designed system, many error sources which can degrade the measurement precision have to be taken into account. Some errors originate from : -the mechanical and electronical integration of the interferometer (mechanical drift, dead path error, resolution limit, noise level, interpolation, cosine error, …) -the environment in which the instrument is installed (mechanical vibration, drift of environmental parameters like pressure, temperature, hygrometry, Edlen correction, air turbulence), -the optical components (mirror shape and roughness, orthogonality error), -intrinsic errors linked to the principles of interferometry (vacuum wavelength calibration of the laser source used, wavelength stability, calibration of environment sensor used for Edlen correction, beam profile quality,…) -… The given presentation will review the main errors sources, quantify and classify them by order of importance and establish the principle rules to achieve nanometer range precision when measuring displacements by interferometry.
	Slides THKA01 [20.051 MB]
Export •	reference for this paper using ※ BibTeX, ※ LaTeX, ※ Text/Word, ※ RIS, ※ EndNote (xml)