Kearney, S.P. Shu, D. JACoW Publishing Geneva, Switzerland 978-3-95450-207-3 10.18429/JACoW-MEDSI2018-WEOAMA05 English 179-183 WEOAMA05 experiment photon simulation interface laser Contribution to a conference proceedings 2018 2018-12 https://doi.org/10.18429/JACoW-MEDSI2018-WEOAMA05 http://jacow.org/medsi2018/papers/weoama05.pdf The Advanced Photon Source Upgrade project includes upgrading several beamlines, which desire nanopositioning and fly-scan capabilities. A step towards achieving this is through the use of flexure stages with minimal trajectory errors. Typically, parasitic motion is on the order of micrometer-level displacements and tens of microradian-level rotations [1]. The cause of such errors is difficult to diagnosis due to the scale and complexity of the overall mechanism. Therefore, an FE model of a flexure pivot nanopositioning stage with centimeter-level travel range [1, 2] has been developed to aid in trajectory error diagnosis. Previous work used an FE model and relative error analysis to quantify the effects of assembly error on trajectory errors [3]. Relative error analysis was used due to the difficulty in validating a complex FE model. This study develops an experimentally validated FE model of a single joint to quantify the expected error in the full FE model. The full model is then compared experimentally to the flexure stage to assess the model accuracy and diagnosis trajectory errors.