| Title |
Mechanical Design and Development of Compact Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range and Nanometer-Level Resolution |
| Authors |
- D. Shu, J.W.J. Anton, S.P. Kearney, B. Lai, W. Liu, J. Maser, C. Roehrig, J.Z. Tischler
ANL, Argonne, Illinois, USA
- J.W.J. Anton
University of Illinois at Chicago, Chicago, USA
|
| Abstract |
Nanopositioning techniques present an important capability to support the state-of-the-art synchrotron radiation instrumentation research for the APS operations and upgrade project. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, two compact linear nanopositiioning flexure stages have been designed and developed at the APS with centimeter-level travel range and nanometer-level resolution for x-ray experimental applications. The APS T8-54 linear flexure stage is designed to perform a precision wire scan as a differential aperture for the 3-D diffraction microscope at the APS sector 34, and the APS T8-56 linear flexure stage is designed for a horizontal sample scanning stage for a hard x-ray microscope at the APS sector 2. Both linear flexure stages are using a similar improved deformation compensated linear guiding mechanism which was developed initially at the APS for the T8-52 flexural linear stage *. The mechanical design and finite element analyses of the APS T8-54 and T8-56 flexural stages, as well as its initial mechanical test results with laser interferometer are described in this paper.
|
| Footnotes & References |
* U.S. Patent granted No. 8,957, 567, D. Shu, S. Kearney, and C. Preissner, 2015.
|
| Funding |
Work supported by the U.S. Department of Energy, Office of Science, under Contract No. DE-AC02-06CH11357. |
| Paper |
download TUBA04.PDF [2.394 MB / 4 pages] |
| Slides |
download TUBA04_TALK.PDF [7.057 MB] |
| Export |
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※ EndNote |
| Conference |
MEDSI2016 |
| Series |
Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conference (9th) |
| Location |
Barcelona, Spain |
| Date |
11-16 September 2016 |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editorial Board |
Joan Casas (ALBA-CELLS, Cerdanyola del Vallès, Spain); Volker RW Schaa (GSI, Darmstadt, Germany); Isidre Costa (ALBA-CELLS, Cerdanyola del Vallès, Spain); David López (ALBA-CELLS, Cerdanyola del Vallès, Spain); Montserrat Prieto (ALBA-CELLS, Cerdanyola del Vallès, Spain) |
| Online ISBN |
978-3-95450-188-5 |
| Received |
10 September 2016 |
| Accepted |
20 September 2016 |
| Issue Date |
22 June 2017 |
| DOI |
doi:10.18429/JACoW-MEDSI2016-TUBA04 |
| Pages |
124-127 |
| Copyright |
 Published by JACoW Publishing under the terms of the Creative Commons Attribution 3.0 International license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |
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