Shu, D. Anton, J.W.J. Kearney, S.P. Lai, B. Liu, W. Maser, J. Roehrig, C. Tischler, J.Z. JACoW Publishing Geneva, Switzerland 978-3-95450-188-5 10.18429/JACoW-MEDSI2016-TUBA04 English 124-127 TUBA04 ion GUI controls laser photon Contribution to a conference proceedings 2017 2017-06 https://doi.org/10.18429/JACoW-MEDSI2016-TUBA04 http://jacow.org/medsi2016/papers/tuba04.pdf Nanopositioning techniques present an important capability to support the state-of-the-art synchrotron radiation instrumentation research for the APS operations and upgrade project. To overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems, two compact linear nanopositiioning flexure stages have been designed and developed at the APS with centimeter-level travel range and nanometer-level resolution for x-ray experimental applications. The APS T8-54 linear flexure stage is designed to perform a precision wire scan as a differential aperture for the 3-D diffraction microscope at the APS sector 34, and the APS T8-56 linear flexure stage is designed for a horizontal sample scanning stage for a hard x-ray microscope at the APS sector 2. Both linear flexure stages are using a similar improved deformation compensated linear guiding mechanism which was developed initially at the APS for the T8-52 flexural linear stage *. The mechanical design and finite element analyses of the APS T8-54 and T8-56 flexural stages, as well as its initial mechanical test results with laser interferometer are described in this paper.