Ito, H. Araki, H. Umemori, K. JACoW Publishing Geneva, Switzerland We have investigated the influence of furnace baking at various baking temperatures on Q-value and trapped flux sensitivity. We find that mid-temperature baking is a promising process for obtaining a high Q-value, but it results in a high flux sensitivity. In particular, 300°C baking results in extremely high Q-value and sensitivity. Instead, 250°C baking is found to be a more effective process than 300°C baking for accelerator applications, as it can reach a higher accelerating gradient while keeping a high Q-value and a lower sensitivity. In addition, we find that 200°C baking can reach a higher Q-value at a high accelerating gradient e.g. 35 MV/m compared to 120°C 48 h baking that is applied to the cavity normally.