Lechner, E.M. Angle, J.W. Baxley, C.G. Kelley, M.J. Reece, C.E. JACoW Publishing Geneva, Switzerland 2673-5504 978-3-95450-234-9 10.18429/JACoW-SRF2023-MOPMB044 English 207-210 SRF cavity niobium vacuum ECR Contribution to a conference proceedings 2023 2023-09 https://doi.org/10.18429/JACoW-SRF2023-MOPMB044 https://jacow.org/srf2023/papers/mopmb044.pdf Surface quality is paramount in facilitating high perfor-mance SRF cavity operation. Here, we investigate the topographic evolution of samples subjected to N-doping and 600 °C vacuum anneal. We show that in N-doped Nb, niobium nitrides may grow continuously along grain boundaries. Upon electropolishing high slope angle grooves are revealed which sets up a condition that may facilitate a supression of the superheating field.