Benjamin, C. Burt, G. Conlon, J.A. Leicester, N.L. Malyshev, O.B. Marks, H.S. Seal, D.J. Smith, L.G.P. Valizadeh, R. JACoW Publishing Geneva, Switzerland 2673-5504 978-3-95450-234-9 10.18429/JACoW-SRF2023-MOPMB011 English 84-87 cavity SRF site target vacuum Contribution to a conference proceedings 2023 2023-09 https://doi.org/10.18429/JACoW-SRF2023-MOPMB011 https://jacow.org/srf2023/papers/mopmb011.pdf A15 superconducting materials, like V₃Si and Nb₃Sn, are potential alternatives to Nb for next generation thin film SRF cavities when operated at 4 K. Their relatively high Tc and superconducting properties could allow for higher accelerating gradients and elevated operating temperatures. We present work on the deposition of V₃Si thin films on planar Cu substrates and an open structure 6 GHz cavity, using physical vapour deposition (PVD) and a V₃Si single target. The surface structure, composition and DC superconducting properties of two planar samples were characterised via secondary electron microscopy (SEM), energy dispersive x-ray spectroscopy (EDX) and in a magnetic field penetration facility. Furthermore, the first deposition using PVD of a V₃Si film on a 6 GHz split cavity and the RF performance is presented.