| Title |
Surface Engineering by ALD for Superconducting RF Cavities |
| Authors |
- Y. Kalboussi, C.Z. Antoine, M. Baudrier, Q. Bertrand, C. Boulch, B. Delatte, G. Jullien, L. Maurice, Th. Proslier, P. Sahuquet, T.V. Vacher
CEA-IRFU, Gif-sur-Yvette, France
- M. Asaduzzaman, T. Junginger
UVIC, Victoria, Canada
- M. Asaduzzaman
TRIUMF, Vancouver, Canada
- D. Dragoe
ICMMO, Orsay, France
- F. Éozénou
CEA-DRF-IRFU, France
- N. Lochet
CEA, DES, Université Paris-Saclay, Gif-sur-Yvette, France
- D. Longuevergne, T. Pépin-Donat
Université Paris-Saclay, CNRS/IN2P3, IJCLab, Orsay, France
- F. Miserque
CEA, LECA, Université Paris-Saclay, Gif-sur-Yvette, France
|
| Abstract |
Atomic Layer Deposition is a synthesis method that enable a unique control of thin films chemical composition and thickness over complex shape objects such as SRF cavities. This level of control opens the way to new surface treatments and to study their effect on RF cavity performances. We will present coupon and, in some cases, preliminary cavity results, from various surface engineering routes based on the deposition of thin oxides and nitrides films combined with post annealing treatments and study their interactions with the niobium. Three main research directions will be presented: 1/ replacing the niobium oxides by other surface layers (Al₂O₃, Y2O3, MgO) and probe their effect on the low and high field performances, 2/ doping with N and combine approaches 1/ and 2/ and finally 3/ optimize the superconducting properties of NbTiN multilayers on Nb and Sapphire.
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| Paper |
download WEIBA01.PDF [1.062 MB / 6 pages] |
| Slides |
download WEIBA01_TALK.PDF [13.613 MB] |
| Cite |
download ※ BibTeX
※ LaTeX
※ Text/Word
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※ EndNote |
| Conference |
SRF2023 |
| Series |
International Conference on RF Superconductivity (21st) |
| Location |
Grand Rapids, MI, USA |
| Date |
25-30 June 2023 |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editorial Board |
Kenji Saito (FRIB, MSU, East Lansing, MI, USA); Ting Xu (FRIB, MSU, East Lansing, MI, USA); Naruhiko Sakamoto (RIKEN, Wako, Japan); Volker R.W. Schaa (GSI, Darmstadt, Germany); Paul W. Thomas (FRIB, MSU, East Lansing, MI, USA) |
| Online ISBN |
978-3-95450-234-9 |
| Online ISSN |
2673-5504 |
| Received |
06 July 2023 |
| Revised |
12 August 2023 |
| Accepted |
19 August 2023 |
| Issue Date |
19 August 2023 |
| DOI |
doi:10.18429/JACoW-SRF2023-WEIBA01 |
| Pages |
615-620 |
| Copyright |
 Published by JACoW Publishing under the terms of the Creative Commons Attribution 4.0 International license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |
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