| Title |
Development of a System for Coating SRF Cavities Using Remote Plasma CVD |
| Authors |
- G. Gaitan, P. Bishop, A.T. Holic, G. Kulina, M. Liepe, J. Sears, Z. Sun
Cornell University (CLASSE), Cornell Laboratory for Accelerator-Based Sciences and Education, Ithaca, New York, USA
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| Abstract |
Next-generation, thin-film surfaces employing Nb₃Sn, NbN, NbTiN, and other compound superconductors are destined to allow reaching superior RF performance levels in SRF cavities. Optimized, advanced deposition processes are required to enable high-quality films of such materials on large and complex-shaped cavities. For this purpose, Cornell University is developing a remote plasma-enhanced chemical vapor deposition (CVD) system that facilitates coating on complicated geometries with a high deposition rate. This system is based on a high-temperature tube furnace with a clean vacuum and furnace loading system. The use of plasma alongside reacting precursors will significantly reduce the required processing temperature and promote precursor decomposition. A vacuum quality monitor (VQM) is used to characterize the residual gases before coating. The CVD system has been designed and is currently under assembly and commissioning.
|
| Funding |
This work was supported by the National Science Foundation under Grant No. PHY-1549132. |
| Paper |
download SUPTEV007.PDF [1.866 MB / 4 pages] |
| Cite |
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| Conference |
SRF2021 |
| Series |
International Conference on RF Superconductivity (20th) |
| Location |
East Lansing, MI, USA |
| Date |
28 June-02 July 2021 |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editorial Board |
Kenji Saito (FRIB, MSU, East Lansing, MI, USA); Ting Xu (FRIB, MSU, East Lansing, MI, USA); Naruhiko Sakamoto (RIKEN, Wako, Japan); Ana Lesage (FRIB, MSU, East Lansing, MI, USA); Volker R.W. Schaa (GSI, Darmstadt, Germany) |
| Online ISBN |
978-3-95450-233-2 |
| Online ISSN |
2673-5504 |
| Received |
09 July 2021 |
| Accepted |
21 August 2021 |
| Issue Date |
10 February 2022 |
| DOI |
doi:10.18429/JACoW-SRF2021-SUPTEV007 |
| Pages |
129-132 |
| Copyright |
 Published by JACoW Publishing under the terms of the Creative Commons Attribution 4.0 International license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |
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