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@InProceedings{leith:srf2019-thp043,
author = {S.B. Leith and X. Jiang and R. Ries and E. Seiler and M. Vogel},
title = {{Deposition Parameter Effects on Niobium Nitride (NbN) Thin Films Deposited Onto Copper Substrates with DC Magnetron Sputtering}},
booktitle = {Proc. SRF'19},
pages = {945--949},
paper = {THP043},
language = {english},
keywords = {site, cathode, ECR, cavity, niobium},
venue = {Dresden, Germany},
series = {International Conference on RF Superconductivity},
number = {19},
publisher = {JACoW Publishing, Geneva, Switzerland},
month = {aug},
year = {2019},
issn = {""},
isbn = {978-3-95450-211-0},
doi = {10.18429/JACoW-SRF2019-THP043},
url = {http://jacow.org/srf2019/papers/thp043.pdf},
note = {https://doi.org/10.18429/JACoW-SRF2019-THP043},
}