| Title |
The Development of Niobium Sputtering on Copper Cavities at IHEP |
| Authors |
- J. Dai, P. He, Z.Q. Li, Y. Ma, F.Y. Yang, P. Zhang
IHEP, Beijing, People’s Republic of China
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| Abstract |
A R&D program focusing on niobium sputtering on copper cavities started at IHEP in 2017. Single-cell 1.3 GHz elliptical cavity shape has been initially chosen as sputtering substrate. A magnetron sputtering system have been developed in 2018. In addition, a surface treatment facility to polish the copper substrate before sputtering has been developed and commissioned. This paper will present the Nb/Cu coating activities at IHEP.
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| Paper |
download TUP072.PDF [1.260 MB / 3 pages] |
| Export |
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| Conference |
SRF2019 |
| Series |
International Conference on RF Superconductivity (19th) |
| Location |
Dresden, Germany |
| Date |
30 June-05 July 2019 |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editorial Board |
Peter Michel (HZDR, Dresden, Germany); André Arnold (HZDR, Dresden, Germany); Volker RW Schaa (GSI, Darmstadt, Germany) |
| Online ISBN |
978-3-95450-211-0 |
| Online ISSN |
"" |
| Received |
19 June 2019 |
| Accepted |
04 July 2019 |
| Issue Date |
14 August 2019 |
| DOI |
doi:10.18429/JACoW-SRF2019-TUP072 |
| Pages |
613-615 |
| Copyright |
 Published by JACoW Publishing under the terms of the Creative Commons Attribution 3.0 International license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |
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