JACoW logo

Joint Accelerator Conferences Website

The Joint Accelerator Conferences Website (JACoW) is an international collaboration that publishes the proceedings of accelerator conferences held around the world.


https://doi.org/10.18429/JACoW-SRF2017-TUPB055
Title Nb3Sn Thin Film Deposition On Copper By DC Magnetron Sputtering
Authors
  • W.W. Tan, B.T. Li, X.Y. Lu, L. Xiao, D. Xie, D.Y. Yang, Y. Yang, Z.Q. Yang, J. Zhao
    PKU, Beijing, People's Republic of China
Abstract Nb3Sn for SRF cavities has been coated on copper samples by DC magnetron Sputtering. Pure Nb target and pure Sn target were installed separately in the magnetron sputtering device. Nb3Sn precursor was coated on copper in the Ar atmosphere of 0.5 Pa. The Nb3Sn precursor was annealed in the vacuum furnace whose pressure is 10⁻⁴ Pa. The XRD results demonstrate the exist of Nb3Sn crystal, and MPMS results show superconductivity of Nb3Sn. The highest critical temperature obtained is 15K.
Paper download TUPB055.PDF [1.659 MB / 4 pages]
Export download ※ BibTeX LaTeXText/WordRISEndNote
Conference SRF2017, Lanzhou, China
Series International Conference on RF Superconductivity (18th)
Proceedings Link to full SRF2017 Proccedings
Session Poster Session
Date 18-Jul-17   14:00–17:00
Main Classification SRF Technology R&D
Sub Classification Cavity
Keywords ion, target, SRF, cavity, niobium
Publisher JACoW, Geneva, Switzerland
Editors Volker RW Schaa (GSI, Darmstadt, Germany); Yuan He (IMP, Lanzhou, China); Lu Li (IMP, Lanzhou, China); Ning Zhao (IHEP, Beijing, China)
ISBN 978-3-95450-191-5
Published January 2018
Copyright
Copyright © 2018 by JACoW, Geneva, Switzerland     CC-BY Creative Commons License
cc Creative Commons Attribution 3.0