We developed a novel medium energy resolution monochromator(MRM) for Resonant Inelastic X-ray Scattering (RIXS) experiments at the High Energy Photon Source (HEPS) featuring an integrated flexible high-precision positioning system that surpasses conventional designs. Our rotation platform delivers unprecedented performance with a travel range of hundreds of milliradians—three times greater than existing systems—while maintaining sub-microradian precision, with potential for nano-radian resolution if an additional simple configuration is developed. The breakthrough innovation is our two-axis rotation mechanism using parallel decoupled architecture that uniquely combines structural rigidity with precise motion control, solving the longstanding challenge of spatial motion decoupling while enhancing stability. Rigorous simulation and testing confirm all performance metrics exceed design targets. This technology not only meets the exacting requirements for monochromators but extends high-precision capabilities in high-vacuum environments, with our parallel decoupling principle offering transformative potential across multiple precision engineering applications.

Multilayer monochromators are commonly employed in photon hungry synchrotron beamlines to deliver intense, monochromatic X-ray beams. We present the design, validation, and beamline integration of a high-stability, high energy (20-70keV) double multilayer monochromator developed for the Structural Dynamics Beamline (SDB) at HEPS. The system features a novel flexure-based architecture, optimized via finite element analysis (FEA), to significantly enhance stiffness, particularly in the roll direction of the Bragg axis. A monolithic flexure mechanism is employed for pitch and gap adjustment of the second multilayer, improving mechanical integrity and stability. A special gravity-driven water cooling system, coupled with a unique indium-gallium interface for clamping and thermal contact, was developed to suppress vibrational disturbances. FEA simulations and experimental validation confirmed a clamping-induced deformation below 69 nrad RMS. A vibration level as low as 5 nrad under cooling was measured by laser interferometry. The system has been successfully installed and tested with synchrotron beam, meeting requirements of the beamline.