Kikuchi, T. Kataoka, K. Mase, K. Nitani, H. Ohigashi, T. Ono, M. Sakurai, T. Tanaka, H. Uezono, N. Yoshikawa, I. Yoshioka, K. JACoW Publishing Geneva, Switzerland Nonevaporable getter (NEG) pumps are widely used in synchrotron radiation facilities because they are oil-free, vibration-free, space-saving, lightweight, and energy-saving. When a NEG thin film is deposited on the inner wall of a vacuum duct, the residual active gases are pumped after baking. Recently we have developed a new NEG thin film that was prepared by the following simple procedure, sublimation of high-purity Ti under UHV in the range of 10⁻⁷ to 10-8 Pa, followed by N₂ introduction., We confirmed that partially nitrided high-purity Ti coating on inner surface of a vacuum vessel pumped H₂, H₂O, O₂ gases, and CO even after 30 cycles of pumping, baking at 185 °C for 6 hours, cooling down to room temperature, introduction of high-purity N₂, and exposure to air. In the present study, we applied surface-partially nitrided high-purity Ti on the inner surface of the vacuum ducts in the upstream section of BL-12C in the Photon Factory 2.5 GeV ring and baked them at 250°C. Pressure in the section reached ultrahigh vacuum of 2.2×10-8 Pa without ion pumps after isolation from the turbomolecular pump with gate valve.