Wei, G. Chen, Y. Hao, X.R. He, J.H. Li, H. Li, H.H. Li, J. Liu, C.Y. Nie, Y. Wang, J. Wang, Y. Xiang, P. Xu, Y. Zhang, J.M. Zhang, Y.X. Zou, Y. JACoW Publishing Geneva, Switzerland 2673-5520 978-3-95450-250-9 10.18429/JACoW-MEDSI2023-TUPYP051 English 108-110 vacuum controls target experiment site Contribution to a conference proceedings 2024 2024-07 https://doi.org/10.18429/JACoW-MEDSI2023-TUPYP051 https://jacow.org/medsi2023/papers/tupyp051.pdf The goal of WALS (Wuhan Advanced Light Source) is to build a world -class radiating light source. Chromium-zirconium-copper was chosen as the main material for the entire storage ring vacuum vessels. And magnetron sputtering (PVD) process was used to deposit NEG coating on the inner surface of copper vacuum chamber, which can further improve the performance of the vacuum. At present, the coating laboratory has taken shape as a whole, and has built a standard cleaning platform, coating platform, ultimate vacuum test platform, extraction rate test platform, coating microstructure test process. As for the coating equipment, bias power supply and custom ceramic parts are added to achieve more functions. Different target materials were controlled by multi-electrode control, while experiments were performed on deposited compositions of different ratios of multilayers; Sample tube bias control access during the coating process; Multiple combinations of target materials and bias parameters for the technique have been studied. Coating is currently underway, and specific test results are in progress.