Jiang, S.K. Du, X.W. Wang, Q.P. JACoW Publishing Geneva, Switzerland 2673-5520 978-3-95450-250-9 10.18429/JACoW-MEDSI2023-TUPYP027 English 70-72 site laser synchrotron vacuum experiment Contribution to a conference proceedings 2024 2024-07 https://doi.org/10.18429/JACoW-MEDSI2023-TUPYP027 https://jacow.org/medsi2023/papers/tupyp027.pdf With the development of synchrotron radiation technology, an actuator with sub-nanometer resolution, 100N driving force, and compatible with ultra-high vacuum environment is required. To achieve synchrotron radiation micro-nano focusing with adjustment resolution of sub-nanometer and high-precision rotation at the nano-arc level, most of the commercial piezoelectric actuators are difficult to meet the requirements of resolution and driving force at the same time. The flexure-based compound bridge-type hinge has the characteristic of amplifying or reducing the input displacement by a certain multiple, and can be used in an ultra-high vacuum environment. According to this characteristic, the bridge-type composite flexible hinge can be combined with commercial piezoelectric actuators, to design a new actuator with sub-nanometer resolution and a driving force of 100N. This poster mainly presents the principle of the new actuator, the design of the prototype and the preliminary test results of its resolution, stroke.