Ma, Y.S. Dong, H. Guo, D.Z. He, P. Huang, T. Sun, F. Yang, Y.C. JACoW Publishing Geneva, Switzerland 2673-5520 978-3-95450-250-9 10.18429/JACoW-MEDSI2023-THPPP047 English 343-345 vacuum cathode synchrotron storage-ring ECR Contribution to a conference proceedings 2024 2024-07 https://doi.org/10.18429/JACoW-MEDSI2023-THPPP047 https://jacow.org/medsi2023/papers/thppp047.pdf Massive production facilities of NEG coated vacuum chambers have been developed for HEPS in Huairou, Beijing, which based on the NEG coating prototypes of HEPS-TF. The facilities can achieve simultaneous coating of 16~20 vacuum chambers of HEPS including irregular shaped vacuum chambers. The pumping per-formance of the NEG coated vacuum chambers has been measured by test facilities. After heating at 200°C for 24 hours, the highest pumping speed of H₂ is about 0.65 l/scm², and the highest capacity of CO is about 1.89×10⁻⁵ mbar·L/cm². The lifetime is more than 20 cycles of air exposure and re-activation. The pumping performance meets the design requirements of HEPS. Currently the NEG coated vacuum chambers are applied to the storage ring of HEPS.