Yan, X.X. Gong, Y.J. Ji, Z. Liu, J.Y. Qin, H. JACoW Publishing Geneva, Switzerland 2673-5520 978-3-95450-250-9 10.18429/JACoW-MEDSI2023-THPPP015 English 303-305 simulation alignment vacuum photon GUI Contribution to a conference proceedings 2024 2024-07 https://doi.org/10.18429/JACoW-MEDSI2023-THPPP015 https://jacow.org/medsi2023/papers/thppp015.pdf High-precision slits are extensively adopted in coherent or nano-focusing beamlines as the secondary source, which can accurately define or achieve a beam size at the micron or sub-micron scale, while maintaining high stability. This paper presents the design of a set of precise slits based on a flexure hinge mechanism, which enables a nano-scale resolution and a stroke of hundreds of microns simultaneously. The coarse or fine adjustment motion of each blade can be accomplished with or without a displacement amplification mechanism, which is driven by a piezo actuator. Furthermore, the kinematic and dynamics models are investigated through finite element analysis (FEA) and numerical analysis successively, yielding consistent results. The optimized slits system can provide a linear stroke of up to 400 um with a resolution of 10 nm both in horizontal and vertical directions, whose first Eigen frequency is 130 Hz.