Qiao, Z. Anton, J.W.J. Assoufid, L. Kearney, S.P. Mashrafi, S.T. Qian, J. Shi, X. Shu, D. JACoW Publishing Geneva, Switzerland 2673-5520 978-3-95450-229-5 10.18429/JACoW-MEDSI2020-TUOA01 English 99-102 optics MMI photon simulation focusing Contribution to a conference proceedings 2021 2021-10 https://doi.org/10.18429/JACoW-MEDSI2020-TUOA01 https://jacow.org/medsi2020/papers/tuoa01.pdf Deformable optics, including mechanically-bent and bimorph mirrors, are essential optical elements for X-ray beam dynamical focusing and wavefront correction. Existing mechanical bender technology often suffers from poor repeatability and does not include twist compensation. We recently developed an elliptically bent mirror based on a laminar flexure bending mechanism that yielded promising results*,**. In this work, the mirror surface twist was characterized using a Fizeau interferometer under different bending conditions. By applying a shimming correction, the surface twist was successfully reduced from 50 urad to 1.5 urad. The twist angle variation from no bending to the maximum bending is less than 0.5 urad. Our simulation results show that these numbers are significantly lower than the required values to ensure optimum optical performance. The study demonstrates the effectiveness of the twist compensation procedures and validates the mirror bender design parameters.