<xml>
  <records>
    <record>
       <contributors>
          <authors>
             <author>Lee, L.</author>
             <author>Morton, D.S.</author>
             <author>Ng, M.L.</author>
             <author>Zhang, L.</author>
          </authors>
       </contributors>
       <titles>
          <title>
             Positioning Behavior of a Lead-Screw Type In-Vacuum Actuator
          </title>
       </titles>
		 <publisher>JACoW Publishing</publisher>
       <pub-location>Geneva, Switzerland</pub-location>
       <abstract>
          In-vacuum actuators are under consideration for operating the bending flexturs of the new Kirkpatrick-Baez focusing mirrors as part of the upgrade to LCLS-II. To achieve an mechanical accuracy of better than 10⁴, the characteristics of the actuators need to be explored. We designed a testing procedure in terms of both setup and actuator excursion program to understand various behaviors of the actuator in a simulated typical operating condition. Multiple independent sensors were used, including optical linear encoder, laser interferometer and capacitive sensors. In this presentation, I will show the testing procedure and results obtained for a commercially available high-precision leadscrew type in-vacuum linear actuator with a stroke of 10 mm and a resolution of 2.5 nm. It was found that under typical static operation conditions, an accuracy of 10⁴ can be achieved without external encoder feedback. Detailed behaviors regarding repeatability and backlash are also discussed.
       </abstract>
    </record>
  </records>
</xml>
