Gonzalez, N. Aballe, L. Carballedo, A. Colldelram, C. Foerster, M. JACoW Publishing Geneva, Switzerland 978-3-95450-207-3 10.18429/JACoW-MEDSI2018-THPH15 English 368-370 THPH15 GUI controls resonance vacuum feedback Contribution to a conference proceedings 2018 2018-12 https://doi.org/10.18429/JACoW-MEDSI2018-THPH15 http://jacow.org/medsi2018/papers/thph15.pdf A new 6-DOF sample manipulator has been designed for the ALBA Synchrotron PhotoEmission Electron Microscopy (PEEM) experimental station, based on a commercial Elmitec LEEM 3. The new design includes full motorization of all 6 axes with position feedback, no backlash, and maximized stability, crucial to achieve the best spatial resolution of down to 8 nm (in so-called LEEM mode). The in-plane longitudinal and transversal motions with sub-micron resolution are based on high precision linear guides, while the pitch and roll stages (sample tilt), guided by angular guides, are actuated by a double-flexure system, which enhances the overall rigidity of the system. The vertical stage is composed by a high rigidity recirculating roller screw and cross roller guides. Finally, 360° yaw rotation is supplied by a differentially pumped commercial rotary stage. On top of the stage, the sample support is mounted on a customized DN63CF flange. This support keeps the original functionalities of the sample manipulator and holders, with 6 independent electrical contacts, and the possibility to heat the sample up to 2000 K and cool it to 100 K with an improved liquid nitrogen cooling system.