| Title |
Morphologies of Oxygen-Free Titanium and Palladium/Titanium Thin Films: New Non-Evaporable Getter (NEG) Coatings |
| Authors |
- T. Miyazawa
Sokendai, The Graduate University for Advanced Studies, Tsukuba, Japan
- A.H. Hashimoto, M. Yamanaka
NIMS, Tsukuba, Ibaraki, Japan
- T. Kikuchi, K. Mase
KEK, Tsukuba, Japan
|
| Abstract |
Non-evaporable getter (NEG) coatings are ideal for maintaining an ultrahigh vacuum (UHV) in the range 10^{'}8 Pa and they are widely used for accelerators because they are oil free, magnetic-field free, vibration free, economical, space saving, and energy efficient. We recently fabricated new NEG coatings consisting of low-oxygen-content Ti or oxygen-free Pd/Ti by sublimation under a clean UHV in the range 10^{'}8 to 10^{'}7 Pa [*]. Here, we report the determination of the morphologies of these films by scanning electron microscopy, transmission electron microscopy, scanning transmission electron microscopy, and energy-dispersive X-ray spectroscopy. The Ti and Pd films had almost uniform thicknesses of about 1.3 'm and 50 nm, respectively, and the Pd film completely overcoated the Ti film. Both the Pd and Ti thin films were uniformly deposited in plane on the stainless steel 304L substrate and they had polycrystalline structures. The interface between the Pd and Ti thin films was not abrupt.
|
| Footnotes & References |
* T. Miyazawa, K. Tobishima, H. Kato, M. Kurihara, S. Ohno, T. Kikuchi, and K. Mase, Vac. Surf. Sci. 61, 227 (2018). |
| Funding |
This research was partly supported by a TIA-Kakehashi grant and by the Global Research Center for Environment and Energy based on Nanomaterials Science. |
| Paper |
download TUPH25.PDF [1.089 MB / 4 pages] |
| Export |
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| Conference |
MEDSI2018, Paris, France |
| Series |
Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (10th) |
| Proceedings |
Link to full MEDSI2018 Proccedings |
| Session |
Accelerators and Core Technology |
| Date |
26-Jun-18 16:40–18:00 |
| Main Classification |
Core technology developments |
| Sub Classification |
Vacuum |
| Keywords |
vacuum, electron, interface, site, experiment |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editors |
Volker RW Schaa (GSI, Darmstadt, Germany); Keihan Tavakoli (SOLEIL, Gif-sur-Yvette, France); Manuel Tilmont (SOLEIL, Gif-sur-Yvette, France) |
| ISBN |
978-3-95450-207-3 |
| Published |
December 2018 |
| Copyright |
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