Noll, T. Sinn, H. Trapp, A. JACoW Publishing Geneva, Switzerland 978-3-95450-188-5 10.18429/JACoW-MEDSI2016-TUBA03 English 121-123 TUBA03 ion FEL alignment optics software Contribution to a conference proceedings 2017 2017-06 https://doi.org/10.18429/JACoW-MEDSI2016-TUBA03 http://jacow.org/medsi2016/papers/tuba03.pdf For the high demanding requirements of the beam-lines of the European XFEL [*] new mirror chambers were developed, designed and tested. A prototype contains the main features of all needed ten units which are tested extensively. The concept of the mirror chamber is a further development of our Cartesian parallel kinematics for X-ray optics in the UHV [**]. The stiffness and vibration behaviour were further improved and the position resolution was increased compared to earlier implementations at Bessy and Flash. For that the drives were redesigned and now feature a stroke of 100 mm with nanometer resolution.