Chen, B.Y. Chang, S.H. Chen, H.Y. Hong, M. Kwo, J.R. Lee, C.Y. Lin, B.H. Tang, M.T. Tseng, S.C. Wu, J.X. Yin, G.C. JACoW Publishing Geneva, Switzerland 978-3-95450-188-5 10.18429/JACoW-MEDSI2016-MOPE24 English 57-59 MOPE24 ion focusing optics alignment photon Contribution to a conference proceedings 2017 2017-06 https://doi.org/10.18429/JACoW-MEDSI2016-MOPE24 http://jacow.org/medsi2016/papers/mope24.pdf The focusing of X-ray nanoprobe at TPS relay upon the special designed Montel mirrors and its adjustment holder. The holder includes two major parts: (1) fundamental-position alignment part and (2) relative-position adjustment part. The fundamental-position alignment part has the ability to adjust the two mirrors together in 6 DOF., such as X, Y, Z, pitch, roll, and yaw. These translation stages have several-tens mm travel range and nm resolution, while the rotational stages have 40 mrad azimuthal angular range and 0.1~0.01 µrad resolution. The relative-position adjustment part can further adjust the two mirrors to minimize the focal spot. During the pre-alignment process, one of the mirrors can be manual adjusted by micrometer heads in three translation directions with several mm travel range and micro-meters resolution. These micrometer heads also provide this mirror three rotational degree of freedoms with sub-mrad resolution. For the further alignment in vacuum, the additional four piezo-motor actuators can precisely adjust the other Montel mirror in the Y and Z direction with several nm resolution, and its pitch and roll with 1 urad and 0.05 urad resolution, respectively.