Ho, H.C. Chen, M.L. Hsu, K.H. Huang, D.-G. Kuan, C.K. Lai, W.Y. Lin, C.J. Perng, S.Y. Tseng, T.C. Wang, H.S. JACoW Publishing Geneva, Switzerland 978-3-95450-188-5 10.18429/JACoW-MEDSI2016-MOPE23 English 54-56 MOPE23 ion survey alignment network photon Contribution to a conference proceedings 2017 2017-06 https://doi.org/10.18429/JACoW-MEDSI2016-MOPE23 http://jacow.org/medsi2016/papers/mope23.pdf Diamond blade type X-ray Beam Position Monitors (XBPM) were adopted to monitor photon position at the beamline front-end in Taiwan Photon Source (TPS). Due to the thin thickness (125um) and fragile characteristic, the assembling precision of the diamond blades are hard to measure and influence the accuracy of monitor. A non-contact method was thus developed by using a led laser with telecentric objective lens and a CCD-array to calibrate the diamond blades assembling configuration within micrometer accuracy. According to the measurement results, XBPM can be correlated to four fiducial points for survey network. This paper describes this method and calibrating results in detail.