Yang, Y. Li, B.T. Lu, X.Y. Tan, W.W. Xiao, L. Xie, D. Yang, D.Y. JACoW Publishing Geneva, Switzerland 2226-0366 978-3-95450-194-6 10.18429/JACoW-LINAC2018-TUPO048 English 438-441 TUPO048 Contribution to a conference proceedings 2019 2019-01 https://doi.org/10.18429/JACoW-LINAC2018-TUPO048 http://jacow.org/linac2018/papers/tupo048.pdf The recent studies of laser annealing on niobium films on copper are reported. Annealing is normally used to deal with the surface, reducing defects and even chang-ing the microstructure of the coating film. Short pulse laser can produce a sharp step temperature field on the film thickness scale (μm), which anneals the surface without substrate heated. The laser annealing experi-ments of niobium thin film sample have been carried out, and according to SEM and FIB results, Nb films melted and recrystallization occurred. Grains growing up can be observed while the power density of laser pulse in-creased.