| Title |
Construction of Thin-film Coating System Toward the Realization of Superconducting Multilayered Structure |
| Authors |
- R. Ito, T. Nagata
ULVAC, Inc, Chiba, Japan
- H. Hayano, T. Kubo, T. Saeki
KEK, Ibaraki, Japan
- H. Ito
Sokendai, Ibaraki, Japan
- Y. Iwashita, R. Katayama
Kyoto ICR, Uji, Kyoto, Japan
- H. Oikawa
Utsunomiya University, Utsunomiya, Japan
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| Abstract |
Although S-I-S (superconductor-insulator-superconductor) multilayered structure is expected to increase the maximum acceleration gradient of SRF cavities, in order for it to function in reality, it is necessary to develop a coating processing that can realize high purity and quality superconducting thin-films. We launched the co-sputtering system to create superconducting alloy thin-films such as Nb3Sn and to research how the characteristics of them change depending on the coating conditions. The deposition rate of two elements was optimized by adjusting each input power, so we successfully obtained an alloy thin-film having appropriate composition ratio. In addition, we developed another experimental equipment for coating on the inner surface of the 3GHz TESLA type small cavities. A cylindrical shape Nb in which some permanent magnets are inserted was adopted as the sputtering target. Glow discharge of the target was confirmed, and the inner-sputtering test was conducted. This presentation reports the specifications of the two sputtering apparatuses and the results of the coating test.
|
| Paper |
download TUPO050.PDF [0.799 MB / 3 pages] |
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| Conference |
LINAC2018 |
| Series |
Linear Accelerator Conference (29th) |
| Location |
Beijing, China |
| Date |
16-21 September 2018 |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editorial Board |
Guoxi Pei (IHEP, Beijing, China); Volker RW Schaa (GSI, Darmstadt, Germany); Yong Ho Chin (KEK, Tsukuba, Japan); Shinian Fu (IHEP, Beijing, China); Ning Zhao (IHEP, Beijing, China) |
| Online ISBN |
978-3-95450-194-6 |
| Online ISSN |
2226-0366 |
| Received |
18 September 2018 |
| Accepted |
08 October 2018 |
| Issue Date |
18 January 2019 |
| DOI |
doi:10.18429/JACoW-LINAC2018-TUPO050 |
| Copyright |
 Published by JACoW Publishing under the terms of the Creative Commons Attribution 3.0 International license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |
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