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is a publisher in Geneva, Switzerland that publishes the
proceedings of accelerator conferences held around the world
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| URL | https://doi.org/10.18429/JACoW-IPAC2025-THPB094 |
|---|---|
| Title | Large-area atomic layer deposition of titanium nitride for RF windows |
| Authors |
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| Abstract | High-power particle accelerators, like the Spallation Neutron Source, require reliable radio-frequency waveguide windows to transmit power while maintaining a vacuum. These windows face performance challenges due to multipacting, an electron cascade disrupting vacuum integrity. Thin TiN coatings can suppress this by reducing secondary electron emission, but traditional methods struggle to uniformly coat complex ceramic surfaces. We developed an atomic layer deposition (ALD) process to create conformal TiN films (<10 (130°c), 2.0. a accelerator accelerators achieving advancing ald and at below cavity ceramic coating coatings collaborating conductive crucial design designed develop disks downtime. efficiency, electron enhance flexibility, for fostering growth.< high-tech higher improve in in-situ innovations laboratory, llc low manufacturing metallic microwave modular national next next-generation nm) oak of operating our performance phase, power. reduce reliability, replaceable rf ridge scale secondary sector smooth, srf surfaces, td techniques technology temperatures these tin-coated to tool up waveguide we will windows with yield> |
| Paper | download: THPB094.pdf |
| Cite | BibTeX, LaTeX, Text/Word, RIS, EndNote |
| Conference | 16th International Particle Accelerator Conference |
| Series | |
| Location | Taipei, Taiwan |
| Date | 01-06 Jun 2025 |
| Publisher | JACoW Publishing, Geneva, Switzerland |
| Editorial Board | * Ming-Chyuan Lin - National Synchrotron Radiation Research Center * Yoichi Sato - KEK * Jui-Che Huang - National Synchrotron Radiation Research Center * David Button - Australian Nuclear Science and Technology Organisation * Ping-Shun Chuang - National Synchrotron Radiation Research Center |
| Online ISBN | 978-3-95450-248-6 |
| Online ISSN | 2673-5490 |
| Received | 30 May 2025 |
| Revised | 04 June 2025 |
| Accepted | 05 June 2025 |
| Issued | 05 November 2025 |
| DOI | 10.18429/JACoW-IPAC2025-THPB094 |
| Pages | 2668-2669 |
| Copyright | Published by JACoW Publishing under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |