THPB004

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URL	https://doi.org/10.18429/JACoW-IPAC2025-THPB004
Title	Development of residual gas analyzer measurement system capable of operating in the 10 Torr vacuum range
Authors	C. Hsu, H. Fung, C. Lee National Synchrotron Radiation Research Center
Abstract	Residual Gas Analyzers (RGA) are widely used to mon-itor gas composition in vacuum systems. However, they are typically limited to high-vacuum environments and cannot be used directly in processes that operate at higher pressures. To solve this problem, we developed a modular and easy-to-build differential pumping system that allows an RGA to monitor vacuum environments up to 10 Torr. In this study, we present the design of this system. Thanks to its modular design, the system can be easily extended to operate at higher working pressures by adding more modules.
Paper	download: THPB004.pdf
Cite	BibTeX, LaTeX, Text/Word, RIS, EndNote
Conference	16th International Particle Accelerator Conference
Series
Location	Taipei, Taiwan
Date	01-06 Jun 2025
Publisher	JACoW Publishing, Geneva, Switzerland
Editorial Board	* Ming-Chyuan Lin - National Synchrotron Radiation Research Center * Yoichi Sato - KEK * Jui-Che Huang - National Synchrotron Radiation Research Center * David Button - Australian Nuclear Science and Technology Organisation * Ping-Shun Chuang - National Synchrotron Radiation Research Center
Online ISBN	978-3-95450-248-6
Online ISSN	2673-5490
Received	26 May 2025
Revised	02 June 2025
Accepted	13 October 2025
Issued	05 November 2025
DOI	10.18429/JACoW-IPAC2025-THPB004
Pages	2507-2509
Copyright	Published by JACoW Publishing under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI.