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| URL | https://doi.org/10.18429/JACoW-IPAC2023-THPA174 |
|---|---|
| Title | Evaluation of low-loss alumina material for high-power RF windows |
| Authors |
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| Abstract | Conventional RF vacuum windows are made of metalized ceramics, hermetically brazed to a pillbox cavity. High-power windows, operating in UHF band, require the fabrication of ceramic disks with diameters on the order of 200mm (8’’). Furthermore, a Titanium Nitride (TiN) multipactor suppression coating must be applied to the ceramic surfaces. The large size and complex internal geometry of these windows create challenges in validating the coating in the fully fabricated assembly. This study evaluates a novel low-loss alumina AO479U, provided by Kyocera, and a reactive sputtering process suitable to deposit a 10-20nm thick TiN coating on a large diameter window. The paper will report the changes in the TiN coating through chemical cleaning and vacuum braze processes using contact profilometry, optical microscopy, Scanning Electron Microscopy (SEM), and Rutherford Backscattering Spectroscopy (RBS). |
| Paper | download: THPA174.pdf |
| Cite | BibTeX, LaTeX, Text/Word, RIS, EndNote |
| Conference | 14th International Particle Accelerator Conference |
| Series | |
| Location | Venice, Italy |
| Date | 07-12 May 2023 |
| Publisher | JACoW Publishing, Geneva, Switzerland |
| Editorial Board | Ralph Assmann - Deutsches Elektronen-Synchrotron DESY Peter McIntosh - Science and Technology Facilities Council (STFC/DL/ASTeC) Giovanni Bisoffi - Istituto Nazionale di Fisica Nucleare (INFN/LNL) Alessandro Fabris - Elettra-Sincrotrone Trieste S.C.p.A. Ivan Andrian - Elettra-Sincrotrone Trieste S.C.p.A. Giulia Vinicola - Istituto Nazionale di Fisica Nucleare (INFN/LNF) |
| Online ISBN | 978-3-95450-231-8 |
| Online ISSN | 2673-5490 |
| Received | 03 May 2023 |
| Revised | 05 May 2023 |
| Accepted | 11 May 2023 |
| Issued | 26 September 2023 |
| DOI | 10.18429/JACoW-IPAC2023-THPA174 |
| Pages | 4373-4376 |
| Copyright | Published by JACoW Publishing under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |