| Title |
High-Quality, Conformal Bellows Coatings Using Ultra-Fast HiPIMS with Precision Ion Energy Control |
| Authors |
- T.J. Houlahan, I. Haehnlein, W.M. Huber, B.E. Jurczyk, I.A. Shchelkanov, R.A. Stubbers
Starfire Industries LLC, Champaign, USA
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| Abstract |
In this paper we demonstrate a replacement for traditional ’wet’ chemical deposition processes using a vacuum, ionized physical vapor deposition (iPVD) process that results in a conformal metal film, capable of coating complex, convoluted parts that are common in modern particle accelerators (e.g., bellows, RF cavities). Results are presented for a process utilizing the combined deposition and etching that are achieved using ultra-fast high-power impulse magnetron sputtering (HiPIMS) coupled with precision control of the ion energy using a positive voltage reversal. This process results in a conformal film and has been used to coat both test coupons and full bellows assemblies. The resulting Cu films, which are 5-10 µm in thickness, exhibit excellent adhesion. Further, they have been shown to tolerate temperature extremes ranging from 77 K to a 400 C vacuum bakeout as well as extreme plastic deformation of the substrate without any buckling, cracking, or delamination.
|
| Funding |
This material is based upon work supported by the U.S. Department of Energy under Award Number DE-SC0020481. |
| Paper |
download WEPAB390.PDF [1.758 MB / 4 pages] |
| Export |
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| Conference |
IPAC2021 |
| Series |
International Particle Accelerator Conference (12th) |
| Location |
Campinas, SP, Brazil |
| Date |
24-28 May 2021 |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editorial Board |
Liu Lin (LNLS, Campinas, Brazil); John M. Byrd (ANL, Lemont, IL, USA); Regis Neuenschwander (LNLS, Campinas, Brazil); Renan Picoreti (LNLS, Campinas, Brazil); Volker R. W. Schaa (GSI, Darmstadt, Germany) |
| Online ISBN |
978-3-95450-214-1 |
| Online ISSN |
2673-5490 |
| Received |
19 May 2021 |
| Accepted |
02 July 2021 |
| Issue Date |
31 August 2021 |
| DOI |
doi:10.18429/JACoW-IPAC2021-WEPAB390 |
| Pages |
3626-3629 |
| Copyright |
 Published by JACoW Publishing under the terms of the Creative Commons Attribution 3.0 International license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |
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