| Title |
Development of Coating Technique for Superconducting Multilayered Structure |
| Authors |
- R. Ito, T. Nagata
ULVAC, Inc, Chiba, Japan
- H. Hayano, T. Kubo, T. Saeki
KEK, Ibaraki, Japan
- H. Ito
Sokendai, Ibaraki, Japan
- Y. Iwashita, R. Katayama
Kyoto ICR, Uji, Kyoto, Japan
- H. Oikawa
Utsunomiya University, Utsunomiya, Japan
|
| Abstract |
In order to increase the maximum acceleration gradient of SRF cavities, S-I-S (superconductor-insulator-superconductor) multilayered structure theory has been proposed. We focused on NbN which has a higher superconducting transition temperature than Nb. Firstly, we researched the optimal deposition condition for N2 gas reactive sputtering of NbN by using in-house inter-back type DC magnetron sputtering equipment. The critical condition for a thin film with strong crystalline orientation of NbN was identified. The superconducting transition temperature of the NbN thin film, which were coated under the best condition, was over 14 K. Secondly, we tried making S-I-S multilayered samples that was composed of NbN/SiO2/Nb substrate. The coating condition for the NbN layer was determined based on the research results in a single layer. The SiO2 layer was deposited with a film thickness of 30 nm that was theoretically expected to be effective as barrier layer. We applied O2 gas reactive AC magnetron sputtering for coating. In this article, the detailed results of the NbN single layer and multilayer film depositions are presented.
|
| Paper |
download THPML120.PDF [1.421 MB / 3 pages] |
| Export |
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| Conference |
IPAC2018, Vancouver, BC, Canada |
| Series |
International Particle Accelerator Conference (9th) |
| Proceedings |
Link to full IPAC2018 Proccedings |
| Session |
MC3/6/7 Poster Session |
| Date |
03-May-18 16:00–17:30 |
| Main Classification |
07 Accelerator Technology |
| Sub Classification |
T07 Superconducting RF |
| Keywords |
site, cavity, target, experiment, acceleration |
| Publisher |
JACoW Publishing, Geneva, Switzerland |
| Editors |
Shane Koscielniak (TRIUMF, Vancouver, BC, Canada); Todd Satogata (JLab, Newport News, VA, USA); Volker RW Schaa (GSI, Darmstadt, Germany); Jana Thomson (TRIUMF, Vancouver, BC, Canada) |
| ISBN |
978-3-95450-184-7 |
| Published |
June 2018 |
| Copyright |
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