Journals of Accelerator Conferences Website (JACoW)
JACoW
is a publisher in Geneva, Switzerland that publishes the
proceedings of accelator conferences held around the world
by an international collaboration of editors.
| URL | https://doi.org/10.18429/JACoW-HIAT2025-THX03 |
|---|---|
| Title | High energy ion implantation at BNL |
| Authors |
|
| Abstract | Silicon carbide (SiC) has several properties such as wide band gap and high voltage breakdown, that give it a significant advantage over silicon for the next generation of medium and high frequency applications. To fully realize these advantages, requires deep ion implantation (~> 6μm). Unfortunately, the energy of conventional ion implanters limits the implantation depth in SiC to approximately 1µm. Brookhaven National Laboratory (BNL) has developed a system that uses the 15 MV MP-class Tandem Van de Graaffs to implant ions in SiC to a depth >15 µm. By changing the ion beam energy in discrete steps, the overlapping implantations can build a uniform implantation profile from the maximum implantation depth to the surface. To implant ions near the surface of the SiC wafer requires the use of an energy absorber to degrade the ion energy from 10’s of MeV to a few keV. BNL has built a system to demonstrate the feasibility of this approach. The BNL system is described, and the results of high energy implantation for high voltage SiC devices are presented. Future improvements to the system are also discussed. |
| Paper | download: THX03.pdf |
| Cite | BibTeX, LaTeX, Text/Word, RIS, EndNote |
| Conference | 16th International Conference on Heavy Ion Accelerator Technology |
| Series | |
| Location | East Lansing, MI, USA |
| Date | 22-27 Jun 2025 |
| Publisher | JACoW Publishing, Geneva, Switzerland |
| Editorial Board | Ling Wang (FRIB/MSU), Kelly Jaje (ANL), Michelle Wier (FRIB/MSU), Kent Wootton (ANL), Tong Zhang (FRIB/MSU) |
| Online ISBN | 978-3-95450-260-8 |
| Online ISSN | 2673-5547 |
| Received | 23 June 2025 |
| Revised | 25 June 2025 |
| Accepted | 25 June 2025 |
| Issued | 13 October 2025 |
| DOI | 10.18429/JACoW-HIAT2025-THX03 |
| Pages | 270-273 |
| Copyright | Published by JACoW Publishing under the terms of the Creative Commons Attribution 4.0 license. Any further distribution of this work must maintain attribution to the author(s), the published article's title, publisher, and DOI. |