Malloch, I.M. LaVere, M.J. Metzgar, E.S. Popielarski, L. JACoW Geneva, Switzerland 978-3-95450-178-6 10.18429/JACoW-SRF2015-MOPB095 English 373-377 MOPB095 cavity SRF linac controls operation Contribution to a conference proceedings 2015 2015-12 http://dx.doi.org/10.18429/JACoW-SRF2015-MOPB095 http://srf2015.vrws.de/papers/mopb095.pdf In preparation of a rigorous superconducting RF (SRF) cavity processing and test plan for the production of the Facility for Rare Isotope Beams (FRIB) driver linac, a state-of-the-art chemical etching tool has been installed in the FRIB coldmass production facility. This paper seeks to summarize the etching equipment design, installation, and validation program and subsequent etching results for a variety of SRF cavity types and etching configurations. Bulk etching, light etching, and custom (frequency tuning) etching results for different FRIB cavities are discussed. Special emphasis is placed on the etching removal uniformity and frequency tuning reliability of these processes.