| Title |
Design Work of the ERL-FEL as the High Intense EUV Light Source |
| Authors |
- N. Nakamura, S. Chen, T. Furuya, K. Haga, I. Hanyu, K. Harada, T. Honda, Y. Honda, E. Kako, Y. Kamiya, R. Kato, H. Kawata, Y. Kobayashi, T. Konomi, T. Kubo, S. Michizono, T. Miyajima, H. Nakai, T. Obina, K. Oide, H. Sakai, S. Sakanaka, M. Shimada, K. Tsuchiya, K. Umemori, M. Yamamoto
KEK, Ibaraki, Japan
- R. Hajima, N. Nishimori
JAEA, Ibaraki-ken, Japan
|
| Abstract |
Energy recovery linac(ERL)-based free electron lasers(FELs) are promising candidates for high-power EUV sources. They can recover most acceleration energy from the electron beams and greatly reduce the dumped beam power and activation compared with those based on ordinary linear accelerators. We have investigated a feasible design of a 10-kW class ERL-FEL operated at 13.5 nm for EUV lithography applications. In this talk, we will present the design work of the ERL-FEL as the high-power EUV source.
|
| Paper |
download MOPCTH010.PDF [2.259 MB / 6 pages] |
| Slides |
download MOPCTH010_TALK.PDF [4.589 MB] |
| Conference |
ERL2015, Stony Brook, NY, USA |
| Series |
ICFA Advanced Beam Dynamics Workshop on Energy Recovery Linacs (56th) |
| Proceedings |
Link to full ERL2015 Proccedings |
| Session |
Plenary Session 3: Operational Experience and Commissioning Results |
| Date |
08-Jun-15 14:00–15:45 |
| Main Classification |
WG6 ERLs |
| Keywords |
FEL, optics, linac, emittance, simulation |
| Publisher |
JACoW, Geneva, Switzerland |
| Editors |
Sergey Belomestnykh (FNAL, Batavia, IL, USA); Caitlin M. Hoffman (BNL, Brookhaven, NY, USA); Volker RW Schaa (GSI, Darmstadt, Germany) |
| ISBN |
978-3-95450-183-0 |
| Published |
September 2015 |
| Copyright |
|
